Open AccessInvestigation of HCl-based surface treatment for GaN devices
Author(s) -
Hiroshi Okada,
Masatohi Shinohara,
Y. Kondo,
Hiroto Sekiguchi,
Keisuke Yamane,
Akihiro Wakahara
Publication year - 2016
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4941210
Subject(s) - x ray photoelectron spectroscopy , materials science , oxide , fabrication , analytical chemistry (journal) , chemical engineering , chemistry , metallurgy , chromatography , engineering , medicine , alternative medicine , pathology
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