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A controllable IC-compatible thin-film fuse realized using electro-explosion
Author(s) -
Xuran Ding,
Wenzhong Lou,
Yue Feng
Publication year - 2016
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.4941074
Subject(s) - fuse (electrical) , substrate (aquarium) , materials science , thin film , mode (computer interface) , optoelectronics , silicon , electrical engineering , current (fluid) , computer science , nanotechnology , engineering , oceanography , geology , operating system
A controllable IC-compatible thin-film fuse was developed that had Al/SiO2 thin-film stacks on a silicon substrate. The micro fuse has both a traditional mode and a controllable mode when applied as a fuse. It blows at 800 mA and 913.8 mV in the traditional mode. In the controllable mode, it blows within 400 ns at 10 V. It can be used for small electronic elements as well as electropyrotechnic initiators to improve the no-firing current

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