Open AccessA MEMS AlN transducer array with flexible interconnections for use as a cochlear implant
Author(s) -
Katherine E. Knisely,
Chuming Zhao,
Karl Grosh
Publication year - 2015
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4939432
Subject(s) - materials science , cantilever , transducer , microelectromechanical systems , microfabrication , tonotopy , acoustics , organ of corti , piezoelectricity , optoelectronics , electrode , cochlea , capacitance , biomedical engineering , fabrication , composite material , engineering , alternative medicine , chemistry , pathology , anatomy , medicine , physics
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