Open AccessExtraction of elastic modulus of porous ultra-thin low-k films by two-dimensional finite-element simulations of nanoindentation
Author(s) -
Oguzhan Orkut Okudur,
Kris Vanstreels,
Ingrid De Wolf,
Ude Hangen
Publication year - 2016
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.4939284
Subject(s) - nanoindentation , nanoindenter , materials science , finite element method , indentation , modulus , elastic modulus , composite material , thin film , porosity , substrate (aquarium) , nanotechnology , structural engineering , oceanography , geology , engineering
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