Open AccessOptical functions of silicon from reflectance and ellipsometry on silicon-on-insulator and homoepitaxial samples
Author(s) -
J. Humlı́ček,
J. Šik
Publication year - 2015
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.4936126
Subject(s) - silicon on insulator , materials science , finesse , refractive index , silicon , molar absorptivity , ellipsometry , spectral line , optoelectronics , ultraviolet , optics , infrared , thin film , fabry–pérot interferometer , physics , wavelength , nanotechnology , astronomy
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