Natural patterning of templates on GaAs by formation of cracks
Author(s) -
Yuxin Song,
Hao Xu,
Yaoyao Li,
Mahdad Sadeghi,
Shumin Wang
Publication year - 2015
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.4922961
Subject(s) - materials science , heterojunction , layer (electronics) , tensile strain , optoelectronics , template , lattice (music) , gallium arsenide , residual stress , substrate (aquarium) , stress relaxation , composite material , ultimate tensile strength , nanotechnology , oceanography , physics , creep , geology , acoustics
Substrate pre-patterning is an effective way to overcome large lattice mismatch and suppress threading defects in the growth of heterostructures. In this work, a new concept was proposed to form natural patterns on commercial substrates monolithically by the formation of surface cracks. Tensile strain was intentionally brought in with a GaAs or GaNAs layer above an InGaAs layer on GaAs substrates. Surface crack patterns successfully formed during the strain relaxation. The strain in a 1 μm buffer layer atop the pattern was found effectively relaxed. Detailed residual strain distribution was simulated by the finite element method
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