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Dependence of the source performance on plasma parameters at the BATMAN test facility
Author(s) -
Christian Wimmer,
U. Fantz
Publication year - 2015
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4916446
Subject(s) - langmuir probe , plasma , atomic physics , plasma parameters , electron , plasma cleaning , electron temperature , electron density , plasma diagnostics , ion , chemistry , materials science , physics , nuclear physics , organic chemistry

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