Open AccessSilicon microfabricated beam expander
Author(s) -
A. Othman,
Mohammad Nizam Ibrahim,
Irni Hamiza Hamzah,
A. A. Sulaiman,
Mohd Fadzil Ain
Publication year - 2015
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4914275
Subject(s) - materials science , silicon , surface micromachining , reflector (photography) , etching (microfabrication) , fabrication , optoelectronics , optics , beam (structure) , nanotechnology , medicine , light source , alternative medicine , physics , pathology , layer (electronics)
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