Open AccessSimulation and characterization of a laterally-driven inertial micro-switch
Author(s) -
Wenguo Chen,
Yang Wang,
Huiying Wang,
Yan Wang,
Guifu Ding,
Zhuoqing Yang,
Hong Wang,
Xiaolin Zhao
Publication year - 2015
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.4906906
Subject(s) - shock (circulatory) , vibration , acceleration , inertial frame of reference , proof mass , surface micromachining , materials science , signal (programming language) , accelerometer , process (computing) , fictitious force , acoustics , mechanics , structural engineering , mechanical engineering , physics , computer science , engineering , fabrication , classical mechanics , medicine , alternative medicine , pathology , quantum mechanics , programming language , operating system
A laterally-driven inertial micro-switch was designed and fabricated using surface micromachining technology. The dynamic response process was simulated by ANSYS software, which revealed the vibration process of movable electrode when the proof mass is shocked by acceleration in sensitive direction. The test results of fabricated inertial micro-switches with and without anti-shock beams indicated that the contact process of micro-switch with anti-shock beams is more reliable than the one without anti-shock beams. The test results indicated that three contact signals had been observed in the contact process of the inertial switch without anti-shock beams, and only one contact signal in the inertial switch with anti-shock beams, which demonstrated that the anti-shock beams can effectively constrain the vibration in non-sensitive direction
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