Characterization of surface modification in atomic force microscope-induced nanolithography of oxygen deficient La0.67Ba0.33MnO3−δ thin films | Zendy

E. K. Tanyi | Zendy; Rajeswari Kolagani | Zendy; Parul Srivastava | Zendy; William E. Vanderlinde | Zendy; Grace Yong | Zendy; Christopher Stumpf | Zendy; David Schaefer | Zendy

Open Access

Characterization of surface modification in atomic force microscope-induced nanolithography of oxygen deficient La0.67Ba0.33MnO3−δ thin films

Author(s) -

E. K. Tanyi,

Rajeswari Kolagani,

Parul Srivastava,

William E. Vanderlinde,

Grace Yong,

Christopher Stumpf,

David Schaefer

Publication year - 2014

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.4904427

Subject(s) - materials science , barium , kelvin probe force microscope , thin film , lanthanum , oxygen , stoichiometry , analytical chemistry (journal) , surface modification , scanning electron microscope , nanolithography , atomic force microscopy , barium oxide , nanotechnology , oxide , chemical engineering , inorganic chemistry , chemistry , composite material , fabrication , metallurgy , engineering , medicine , alternative medicine , organic chemistry , chromatography , pathology

We report our studies of the nanolithographic surface modifications induced by an Atomic Force Microscope (AFM) in epitaxial thin films of oxygen deficient Lanthanum Barium Manganese Oxide (La0.67Ba0.33MnO3−δ). The pattern characteristics depend on the tip voltage, tip polarity, voltage duration, tip force, and humidity. We have used Electron Energy Dispersive X-Ray Spectroscopy (EDS) to analyze the chemical changes associated with the surface modifications produced with a negatively biased AFM tip. A significant increase in the oxygen stoichiometry for the patterned regions relative to the pristine film surface is observed. The results also indicate changes in the cation stoichiometry, specifically a decrease in the Lanthanum and Manganese concentrations and an increase in the Barium concentration in the patterned regions

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