In-situ scanning electron microscopy study of fracture events during back-end-of-line microbeam bending tests | Zendy

Kris Vanstreels | Zendy; Ingrid De Wolf | Zendy; Houman Zahedmanesh | Zendy; H. Bender | Zendy; Mario González | Zendy; Joseph Lefebvre | Zendy; S. Bhowmick | Zendy

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In-situ scanning electron microscopy study of fracture events during back-end-of-line microbeam bending tests

Author(s) -

Kris Vanstreels,

Ingrid De Wolf,

Houman Zahedmanesh,

H. Bender,

Mario González,

Joseph Lefebvre,

S. Bhowmick

Publication year - 2014

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.4902516

Subject(s) - microbeam , materials science , bending , scanning electron microscope , composite material , fracture (geology) , back end of line , in situ , nanoindentation , delamination (geology) , optics , chemistry , physics , organic chemistry , paleontology , subduction , layer (electronics) , biology , tectonics

This paper demonstrates the direct observation of crack initiation, crack propagation, and interfacial delamination events during in-situ microbeam bending tests of FIB milled BEOL structures. The elastic modulus and the critical force of fracture of the BEOL beam samples were compared for beams of different length and width.

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