Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range | Zendy

TingWei Liu | Zendy; Yao-Chuan Tsai | Zendy; YuChing Lin | Zendy; Takahito Ono | Zendy; Shuji Tanaka | Zendy; Tsung-Tsong Wu | Zendy

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Design and fabrication of a phononic-crystal-based Love wave resonator in GHz range

Author(s) -

TingWei Liu,

Yao-Chuan Tsai,

YuChing Lin,

Takahito Ono,

Shuji Tanaka,

Tsung-Tsong Wu

Publication year - 2014

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.4902018

Subject(s) - resonator , fabrication , microelectromechanical systems , materials science , optoelectronics , micrometer , substrate (aquarium) , crystal (programming language) , optics , physics , computer science , medicine , oceanography , alternative medicine , pathology , programming language , geology

This paper presents a method for designing and fabricating a Love wave resonator utilizing the phononic crystal (PC) as the reflectors. The PCs were formed by depositing 2D, periodically etched silica film on a quartz substrate. We analyzed the PC structure, and within its partial bandgap we designed a one-port resonator that contained a set of inter-digital transducer (IDT) inside the resonant cavity bonded by two PC arrays. With sub-micrometer structures, the resonator was designed to operate at 1.25 GHz. The device was fabricated by employing the microelectromechanical system (MEMS) fabrication technology and the resonant performance was evaluated

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