Magnetron deposition of metal-ceramic protective coatings on glasses of windows of space vehicles
Author(s) -
В. П. Сергеев,
V. E. Panin,
Sergei G. Psakhie,
Alexandr G. Chernyavskii,
Valerii P. Svechkin,
Yurii F. Khristenko,
М. П. Калашников,
Andrei V. Voronov
Publication year - 2014
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4901499
Subject(s) - materials science , ceramic , amorphous solid , nanocomposite , composite material , sputter deposition , cavity magnetron , indentation hardness , phase (matter) , layer (electronics) , metallurgy , thin film , microstructure , nanotechnology , sputtering , crystallography , chemistry , organic chemistry
Transparent refractory metal-ceramic nanocomposite coatings with a high coefficient of elasticrecovery and microhardness on the basis of Ni/Si-Al-N are formed on a glass substrate by the pulse magnetron deposition method. The structure-phase states were investigated by TEM, SEM. It was established that the first layer consists of Ni nanograins with a fcc crystalline lattice, the second layer is two-phase: 5-10 nm nanocrystallites of the AlN phase with the hcp crystalline lattice in amorphous matrix of the Si3N4 phase
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