Open AccessFabrication of nanostructure by physical vapor deposition with glancing angle deposition technique and its applications
Author(s) -
Mati Horprathum,
Pitak Eiamchai,
J. Kaewkhao,
Chanunthorn Chananawathorn,
Viyapol Patthanasettakul,
Saksorn Limwichean,
Noppadon Nuntawong,
Pongpan Chindaudom
Publication year - 2014
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4897091
Subject(s) - materials science , physical vapor deposition , nanostructure , sputter deposition , thin film , nanotechnology , indium tin oxide , electron beam physical vapor deposition , fabrication , evaporation , deposition (geology) , chemical vapor deposition , sputtering , raman spectroscopy , optoelectronics , optics , medicine , paleontology , alternative medicine , pathology , sediment , biology , physics , thermodynamics