Fabrication of nanostructure by physical vapor deposition with glancing angle deposition technique and its applications | Zendy

Mati Horprathum | Zendy; Pitak Eiamchai | Zendy; J. Kaewkhao | Zendy; Chanunthorn Chananawathorn | Zendy; Viyapol Patthanasettakul | Zendy; Saksorn Limwichean | Zendy; Noppadon Nuntawong | Zendy; Pongpan Chindaudom | Zendy

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Fabrication of nanostructure by physical vapor deposition with glancing angle deposition technique and its applications

Author(s) -

Mati Horprathum,

Pitak Eiamchai,

J. Kaewkhao,

Chanunthorn Chananawathorn,

Viyapol Patthanasettakul,

Saksorn Limwichean,

Noppadon Nuntawong,

Pongpan Chindaudom

Publication year - 2014

Publication title -

aip conference proceedings

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.177

H-Index - 75

eISSN - 1551-7616

pISSN - 0094-243X

DOI - 10.1063/1.4897091

Subject(s) - materials science , physical vapor deposition , nanotechnology , sputter deposition , thin film , nanostructure , indium tin oxide , electron beam physical vapor deposition , deposition (geology) , fabrication , evaporation , chemical vapor deposition , sputtering , raman spectroscopy , optoelectronics , optics , medicine , paleontology , alternative medicine , physics , pathology , sediment , biology , thermodynamics

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