Open AccessElectromechanical coupling and gigahertz elastic properties of ScAlN films near phase boundary
Author(s) -
Takahiko Yanagitani,
Masashi Suzuki
Publication year - 2014
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.4896262
Subject(s) - materials science , temperature coefficient , electromechanical coupling coefficient , phase boundary , coupling (piping) , resonator , phase (matter) , coupling coefficient of resonators , thermal stability , composite material , condensed matter physics , optoelectronics , piezoelectricity , chemistry , physics , organic chemistry
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