Open AccessCombination of grazing incidence x-ray fluorescence with x-ray reflectivity in one table-top spectrometer for improved characterization of thin layer and implants on/in silicon wafers
Author(s) -
Dieter Ingerle,
M. Schiebl,
Christina Streli,
P. Wobrauschek
Publication year - 2014
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.4893383
Subject(s) - x ray reflectivity , materials science , wafer , optics , silicon , reflectometry , optoelectronics , goniometer , nanometre , x ray fluorescence , thin film , fluorescence , nanotechnology , physics , computer science , time domain , computer vision
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