Open AccessResolving three-dimensional shape of sub-50 nm wide lines with nanometer-scale sensitivity using conventional optical microscopes
Author(s) -
Ravikiran Attota,
Ronald G. Dixson
Publication year - 2014
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.4891676
Subject(s) - nanomanufacturing , microscope , optical microscope , nanometre , materials science , optics , sensitivity (control systems) , laser linewidth , microscopy , scale (ratio) , nanometrology , nanotechnology , atomic force microscopy , physics , scanning electron microscope , laser , engineering , quantum mechanics , electronic engineering
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