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Investigation of structural and optical properties of Ag nanoclusters formed in Si(100) after multiple implantations of low energies Ag ions and post-thermal annealing at a temperature below the Ag-Si eutectic point
Author(s) -
Mangal Dhoubhadel,
Bibhudutta Rout,
Wickramaarachchige J. Lakshantha,
Sushanta K. Das,
Francis D’Souza,
Gary A. Glass,
Floyd D. McDaniel
Publication year - 2014
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4890698
Subject(s) - nanoclusters , x ray photoelectron spectroscopy , rutherford backscattering spectrometry , materials science , annealing (glass) , analytical chemistry (journal) , transmission electron microscopy , silicon , sputtering , ion , channelling , silicide , ion implantation , thin film , optoelectronics , nanotechnology , chemistry , physics , organic chemistry , nuclear magnetic resonance , chromatography , composite material
This paper investigates the synthesis of Ag NCs in Si(100) substrate by implanting multiple energies and fluences of Ag ions and subsequent thermal annealing

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