Open AccessPrediction of porous dielectric line wiggling phenomenon with metallic hard mask: From simulation to experiment
Author(s) -
J. Ducoté,
N. Possémé,
T. David,
Maxime Dar,
T. Chevolleau,
M. Guillermet
Publication year - 2014
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.4882080
Subject(s) - materials science , dielectric , composite material , relaxation (psychology) , porous medium , residual stress , porosity , modulus , stress (linguistics) , back end of line , stress relaxation , finite element method , structural engineering , optoelectronics , creep , psychology , social psychology , linguistics , philosophy , engineering
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