In-situ scanning electron microscopy and atomic force microscopy Young's modulus determination of indium oxide microrods for micromechanical resonator applications | Zendy

J. Bartolomé | Zendy; P. Hidalgo | Zendy; David Maestre | Zendy; Ana Cremades | Zendy; J. Piqueras | Zendy

Open Access

In-situ scanning electron microscopy and atomic force microscopy Young's modulus determination of indium oxide microrods for micromechanical resonator applications

Author(s) -

J. Bartolomé,

P. Hidalgo,

David Maestre,

Ana Cremades,

J. Piqueras

Publication year - 2014

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.4872461

Subject(s) - scanning electron microscope , materials science , acoustic microscopy , photoconductive atomic force microscopy , elastic modulus , microscopy , conductive atomic force microscopy , resonator , atomic force acoustic microscopy , non contact atomic force microscopy , young's modulus , optics , magnetic force microscope , scanning capacitance microscopy , nanotechnology , optoelectronics , composite material , scanning confocal electron microscopy , atomic force microscopy , physics , quantum mechanics , magnetic field , magnetization

Electric field induced mechanical resonances of In2O3 microrods are studied by in-situ measurements in the chamber of a scanning electron microscope. Young's moduli of rods with different cross-sectional shapes are calculated from the resonance frequency, and a range of values between 131 and 152GPa are obtained. A quality factor of 1180-3780 is measured from the amplitude-frequency curves, revealing the suitability of In2O3 microrods as micromechanical resonators. The Young's modulus, E, of one of the rods is also measured from the elastic response in the force-displacement curve recorded in an atomic force microscope. E values obtained by in-situ scanning electron microscopy and by atomic force microscopy are found to differ in about 8%. The results provide data on Young's modulus of In2O3 and confirm the suitability of in-situ scanning electron microscopy mechanical resonance measurements to investigate the elastic behavior of semiconductor microrods

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research