Zero displacement microelectromechanical force sensor using feedback control | Zendy

M. Bulut Coşkun | Zendy; Steven Ian Moore | Zendy; S. O. Reza Moheimani | Zendy; Adrian Neild | Zendy; Tuncay Alan | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Zero displacement microelectromechanical force sensor using feedback control

Author(s) -

M. Bulut Coşkun,

Steven Ian Moore,

S. O. Reza Moheimani,

Adrian Neild,

Tuncay Alan

Publication year - 2014

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.4871380

Subject(s) - microscale chemistry , sensitivity (control systems) , displacement (psychology) , microelectromechanical systems , range (aeronautics) , materials science , acoustics , control theory (sociology) , physics , computer science , nanotechnology , electronic engineering , control (management) , engineering , artificial intelligence , psychology , mathematics education , mathematics , composite material , psychotherapist

Conventional microscale force sensors use moving parts to infer applied forces. Whenever physical deformations are involved, the sensor characteristics become a function of mechanical parameters, and there is an inevitable trade-off between the sensitivity and measurement range. We developed a microfabricated force sensor that uses feedback control to nullify any displacements within the device, directly transducing forces as high as 1.5 mN with a 7.8 nN resolution. The range and sensitivity of the device no longer depend on mechanical parameters, which allow the same device to be used to test samples with a wide range of stiffnesses without loss of accuracy

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research