Influence of substrate miscut angle on surface morphology and luminescence properties of AlGaN | Zendy

Gunnar Kusch | Zendy; Haoning Li | Zendy; P. R. Edwards | Zendy; Jochen Bruckbauer | Zendy; Thomas C. Sadler | Zendy; P. J. Parbrook | Zendy; Robert Martin | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Influence of substrate miscut angle on surface morphology and luminescence properties of AlGaN

Author(s) -

Gunnar Kusch,

Haoning Li,

P. R. Edwards,

Jochen Bruckbauer,

Thomas C. Sadler,

P. J. Parbrook,

Robert Martin

Publication year - 2014

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.4867165

Subject(s) - cathodoluminescence , materials science , substrate (aquarium) , bunches , scanning electron microscope , luminescence , morphology (biology) , diffraction , optoelectronics , optics , composite material , physics , beam (structure) , geology , oceanography , paleontology

The influence of substrate miscut on Al0.5Ga0.5N layers was investigated using cathodoluminescence (CL) hyperspectral imaging and secondary electron imaging in an environmental scanning electron microscope. The samples were also characterized using atomic force microscopy and high resolution X-ray diffraction. It was found that small changes in substrate miscut have a strong influence on the morphology and luminescence properties of the AlGaN layers. Two different types are resolved. For low miscut angle, a crack-free morphology consisting of randomly sized domains is observed, between which there are notable shifts in the AlGaN near band edge emission energy. For high miscut angle, a morphology with step bunches and compositional inhomogeneities along the step bunches, evidenced by an additional CL peak along the step bunches, are observed. (C) 2014 Author(s)

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research