Open AccessHigh precision laser induced etching of multilayered MoS2
Author(s) -
Pil Ju Ko,
Tran Viet Thu,
Hideki Takahashi,
Abdelkader Abderrahmane,
Tsukasa Takamura,
Adarsh Sandhu
Publication year - 2014
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4866622
Subject(s) - etching (microfabrication) , materials science , raman spectroscopy , laser , fabrication , optoelectronics , atomic force microscopy , wavelength , irradiation , spectroscopy , optics , nanotechnology , alternative medicine , layer (electronics) , pathology , quantum mechanics , nuclear physics , medicine , physics
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