Open AccessReduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry
Author(s) -
Emigdio ChávezÁngel,
J. S. Reparaz,
Jordi GomisBrescó,
Markus R. Wagner,
J. Cuffe,
Bartłomiej Graczykowski,
A. Shchepetov,
Haochuan Jiang,
Mika Prunnila,
Jouni Ahopelto,
F. Alzina,
C. M. Sotomayor Torres
Publication year - 2014
Publication title -
apl materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.571
H-Index - 60
ISSN - 2166-532X
DOI - 10.1063/1.4861796
Subject(s) - thermal conductivity , materials science , membrane , raman spectroscopy , phonon , silicon , amorphous solid , raman scattering , conductivity , analytical chemistry (journal) , composite material , optoelectronics , condensed matter physics , optics , crystallography , chemistry , biochemistry , physics , chromatography
We report on the reduction of the thermal conductivity in ultra-thin suspended Si membranes with high crystalline quality. A series of membranes with thicknesses ranging from 9 nm to 1.5 μm was investigated using Raman thermometry, a novel contactless technique for thermal conductivity determination. A systematic decrease in the thermal conductivity was observed as reducing the thickness, which is explained using the Fuchs-Sondheimer model through the influence of phonon boundary scattering at the surfaces. The thermal conductivity of the thinnest membrane with d = 9 nm resulted in (9 ± 2) W/mK, thus approaching the amorphous limit but still maintaining a high crystalline quality
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