Evolution of (001) and (111) facets for selective epitaxial growth inside submicron trenches | Zendy

Shidong Jiang | Zendy; Clément Merckling | Zendy; Weiming Guo | Zendy; Niamh Waldron | Zendy; M. Caymax | Zendy; W. Vandervorst | Zendy; Marc Seefeldt | Zendy; Marc Heyns | Zendy

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Evolution of (001) and (111) facets for selective epitaxial growth inside submicron trenches

Author(s) -

Shidong Jiang,

Clément Merckling,

Weiming Guo,

Niamh Waldron,

M. Caymax,

W. Vandervorst,

Marc Seefeldt,

Marc Heyns

Publication year - 2014

Publication title -

journal of applied physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.699

H-Index - 319

eISSN - 1089-7550

pISSN - 0021-8979

DOI - 10.1063/1.4861416

Subject(s) - facet (psychology) , kinetic energy , faceting , exponent , materials science , epitaxy , growth rate , diffusion , curvature , surface diffusion , surface energy , aspect ratio (aeronautics) , surface (topology) , condensed matter physics , nanotechnology , chemistry , thermodynamics , geometry , physics , mathematics , optoelectronics , composite material , classical mechanics , layer (electronics) , philosophy , linguistics , psychology , social psychology , adsorption , big five personality traits , personality

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