An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements | Zendy

Thomas Dargent | Zendy; Kamel Haddadi | Zendy; T. Lasri | Zendy; Nicolas Clément | Zendy; D. Ducatteau | Zendy; Bernard Legrand | Zendy; Hassan Tanbakuchi | Zendy; D. Théron | Zendy

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An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements

Author(s) -

Thomas Dargent,

Kamel Haddadi,

T. Lasri,

Nicolas Clément,

D. Ducatteau,

Bernard Legrand,

Hassan Tanbakuchi,

D. Théron

Publication year - 2013

Publication title -

review of scientific instruments

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.605

H-Index - 165

eISSN - 1089-7623

pISSN - 0034-6748

DOI - 10.1063/1.4848995

Subject(s) - interferometry , calibration , microwave , optics , interference (communication) , interference microscopy , microscope , spectrum analyzer , microwave imaging , materials science , physics , computer science , telecommunications , channel (broadcasting) , quantum mechanics

International audienceWe report on an adjustable interferometric set-up for Scanning Microwave Microscopy. This interferometer is designed in order to combine simplicity, a relatively flexible choice of the frequency of interference used for measurements as well as the choice of impedances range where the interference occurs. A vectorial calibration method based on a modified 1-port error model is also proposed. Calibrated measurements of capacitors have been obtained around the test frequency of 3.5 GHz down to about 0.1 fF. Comparison with standard vector network analyzer measurements is shown to assess the performance of the proposed system

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