Open AccessEvaluation of the surface bonding energy of an InP membrane bonded oxide-free to Si using instrumented nanoindentation
Author(s) -
Konstantinos Pantzas,
G. Patriarche,
Éric Le Bourhis,
David Troadec,
Ahmad Itawi,
G. Beaudoin,
I. Sagnes,
A. Talneau
Publication year - 2013
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.4817675
Subject(s) - nanoindentation , materials science , oxide , surface energy , composite material , nanotechnology , metallurgy
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