Open AccessIn situ high-temperature characterization of AlN-based surface acoustic wave devices
Author(s) -
Thierry Aubert,
Jochen Bardong,
Ouarda Legrani,
O. Elmazria,
Badreddine Assouar,
Gudrun Bruckner,
Abdelkrim Talbi
Publication year - 2013
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.4812565
Subject(s) - sapphire , materials science , surface acoustic wave , iridium , in situ , characterization (materials science) , transducer , optoelectronics , wide bandgap semiconductor , acoustics , nanotechnology , optics , chemistry , physics , laser , biochemistry , organic chemistry , catalysis
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