Open AccessEffect of high temperature deposition on CoSi2 phase formation
Author(s) -
C.M. Comrie,
H. Ahmed,
D. Smeets,
J. Demeulemeester,
Stuart Turner,
G. Van Tendeloo,
Christophe Detavernier,
A. Vantomme
Publication year - 2013
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.4811352
Subject(s) - nucleation , materials science , deposition (geology) , thin film , transmission electron microscopy , phase (matter) , microstructure , analytical chemistry (journal) , chemical engineering , chemistry , nanotechnology , metallurgy , paleontology , organic chemistry , chromatography , sediment , engineering , biology
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