Open AccessAppearance of local strain fields and high electrical conductivity of macro-defects in P+-implanted 4H-SiC
Author(s) -
Kotaro Ishiji,
Seiji Kawado,
Yasuharu Hirai,
Shingo Nagamachi
Publication year - 2013
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.4807158
Subject(s) - materials science , annealing (glass) , electrical resistivity and conductivity , synchrotron , conductivity , ion implantation , crystallography , scanning electron microscope , crystallographic defect , composite material , optics , chemistry , ion , organic chemistry , electrical engineering , engineering , physics
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