Tip-based chemical vapor deposition with a scanning nano-heater | Zendy

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Tip-based chemical vapor deposition with a scanning nano-heater

Author(s) -

Angelo Gaitas

Publication year - 2013

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.4799654

Subject(s) - nanolithography , chemical vapor deposition , silicon , copper , substrate (aquarium) , nano , argon , materials science , oxide , deposition (geology) , nanotechnology , copper oxide , oxygen , chemical engineering , optoelectronics , chemistry , metallurgy , fabrication , composite material , organic chemistry , medicine , paleontology , oceanography , alternative medicine , pathology , sediment , engineering , biology , geology

In this preliminary effort, a moving nano-heater directs a chemical vapor deposition reaction (nano-CVD) demonstrating a tip-based nanofabrication (TBN) method. Localized nano-CVD of copper (Cu) and copper oxide (CuO) on a silicon (Si) and silicon oxide (SiO2) substrate from gasses, namely sublimated copper acetylacetonate (Cu(acac)2), argon (Ar), and oxygen (O2), is demonstrated. This technique is applicable to other materials.Electrical Engineering, Mathematics and Computer Scienc

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