Estimation of sputtering damages on a magnetron H− ion source induced by Cs+ and H+ ions
Author(s) -
H. Pereira,
J. Lettry,
J. Alessi,
T. Kalvas
Publication year - 2013
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4792773
Subject(s) - ion source , sputtering , materials science , anode , ion , ionization , cathode , cavity magnetron , sputter deposition , hydrogen , atomic physics , ion beam , plasma , analytical chemistry (journal) , chemistry , physics , electrode , thin film , nuclear physics , nanotechnology , chromatography , organic chemistry
An H− ion source is being developed for CERN’s Linac4 accelerator. A beam current requirement of 80 mA and a reliability above 99% during 1 year with 3 month uninterrupted operation periods are mandatory. To design a low-maintenance long life-time source, it is important to investigate and understand the wear mechanisms. A cesiated plasma discharge ion source, such as the BNL magnetron source, is a good candidate for the Linac4 ion source. However, in the magnetron source operated at BNL, the removal of material from the molybdenum cathode and the stainless steel anode cover plate surfaces is visible after extended operation periods. The observed sputtering traces are shown to result from cesium vapors and hydrogen gas ionized in the extraction region and subsequently accelerated by the extraction field. This paper presents a quantitative estimate of the ionization of cesium and hydrogen by the electron and H− beams in the extraction region of BNL’s magnetron ion source. The respective contributions of Cs+ and H+ ions to the sputtering process are estimated
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