Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range | Zendy

R. van der Meer | Zendy; I. V. Kozhevnikov | Zendy; B. Krishnan | Zendy; Jurriaan Huskens | Zendy; P.E. Hegeman | Zendy; C. G. S. Brons | Zendy; B. Vratzov | Zendy; Hubertus M.J. Bastiaens | Zendy; Klaus J. Boller | Zendy; F. Bijkerk | Zendy

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Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range

Author(s) -

R. van der Meer,

I. V. Kozhevnikov,

B. Krishnan,

Jurriaan Huskens,

P.E. Hegeman,

C. G. S. Brons,

B. Vratzov,

Hubertus M.J. Bastiaens,

Klaus J. Boller,

F. Bijkerk

Publication year - 2013

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.4774297

Subject(s) - lamellar structure , optics , materials science , sideband , soft x rays , spectral resolution , range (aeronautics) , resolution (logic) , free spectral range , spectral line , optoelectronics , physics , wavelength , laser , quantum mechanics , astronomy , artificial intelligence , microwave , computer science , composite material

We demonstrate single-order operation of Lamellar Multilayer Gratings in the soft x-ray spectral range. The spectral resolution was found to be 3.8 times higher than from an unpatterned multilayer mirror, while there were no significant spectral sideband structures adjacent to the main Bragg peak. The measured spectral bandwidths and peak reflectivities were in good agreement with our theoretical calculations

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