Development of vacuum ultraviolet absorption spectroscopy system for wide measurement range of number density using a dual-tube inductively coupled plasma light source | Zendy

Akira Kuwahara | Zendy; Makoto Matsui | Zendy; Yoshiki Yamagiwa | Zendy

Open Access

Development of vacuum ultraviolet absorption spectroscopy system for wide measurement range of number density using a dual-tube inductively coupled plasma light source

Author(s) -

Akira Kuwahara,

Makoto Matsui,

Yoshiki Yamagiwa

Publication year - 2012

Publication title -

review of scientific instruments

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.605

H-Index - 165

eISSN - 1089-7623

pISSN - 0034-6748

DOI - 10.1063/1.4770118

Subject(s) - materials science , inductively coupled plasma , spectroscopy , plasma , plasma diagnostics , xenon , range (aeronautics) , absorption spectroscopy , atomic physics , absorption (acoustics) , tube (container) , optics , extreme ultraviolet , vacuum tube , analytical chemistry (journal) , physics , laser , chemistry , nuclear physics , quantum mechanics , chromatography , composite material

A vacuum ultraviolet absorption spectroscopy system for a wide measurement range of atomic number densities is developed. Dual-tube inductively coupled plasma was used as a light source. The probe beam profile was optimized for the target number density range by changing the mass flow rate of the inner and outer tubes. This system was verified using cold xenon gas. As a result, the measurement number density range was extended from the conventional two orders to five orders of magnitude.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research