Performance of a permanent-magnet helicon source at 27 and 13 MHz

A small helicon source is used to create dense plasma and inject it into a large chamber. A permanent magnet is used for the dc magnetic field (B-field), making the system very simple and compact. Though theory predicts that better antenna coupling will occur at 27.12 MHz, it was found that 13.56 MHz surprisingly gives even higher density due to practical effects not included in theory. Complete density n and electron temperature Te profiles are measured at three distances below the source. The plasma inside the source is also measured with a special probe, even under the antenna. The density there is lower than expected because the plasma created is immediately ejected, filling the experimental chamber. The advantage of helicons over inductively coupled plasmas (with no B-field) increases with RF power. At high B-fields, edge ionization by the Trivelpiece-Gould mode can be seen. These results are useful for design of multiple-tube, large-area helicon sources for plasma etching and deposition because prob...