An instrument for 3D x-ray nano-imaging | Zendy

Mirko Holler | Zendy; Jörg Raabe | Zendy; Ana Díaz | Zendy; Manuel GuizarSicairos | Zendy; C. Quitmann | Zendy; Andreas Menzel | Zendy; Oliver Bunk | Zendy

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An instrument for 3D x-ray nano-imaging

Author(s) -

Mirko Holler,

Jörg Raabe,

Ana Díaz,

Manuel GuizarSicairos,

C. Quitmann,

Andreas Menzel,

Oliver Bunk

Publication year - 2012

Publication title -

review of scientific instruments

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.605

H-Index - 165

eISSN - 1089-7623

pISSN - 0034-6748

DOI - 10.1063/1.4737624

Subject(s) - optics , pinhole (optics) , materials science , resolution (logic) , microscopy , lithography , diffraction , image resolution , interferometry , sample (material) , coherent diffraction imaging , pinhole camera , beam (structure) , physics , phase retrieval , computer science , fourier transform , quantum mechanics , artificial intelligence , thermodynamics

We present an instrument dedicated to 3D scanning x-ray microscopy, allowing a sample to be precisely scanned through a beam while the angle of x-ray incidence can be changed. The position of the sample is controlled with respect to the beam-defining optics by laser interferometry. The instrument achieves a position stability better than 10 nm standard deviation. The instrument performance is assessed using scanning x-ray diffraction microscopy and we demonstrate a resolution of 18 nm in 2D imaging of a lithographic test pattern while the beam was defined by a pinhole of 3 μm in diameter. In 3D on a test object of copper interconnects of a microprocessor, a resolution of 53 nm is achieved.

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