Open AccessComparison of two experimental methods for the mechanical characterization of thin or thick films from the study of micromachined circular diaphragms
Author(s) -
C. Malhaire
Publication year - 2012
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.4719964
Subject(s) - materials science , finite element method , dimensionless quantity , residual stress , deep reactive ion etching , vibration , composite material , material properties , parametric statistics , structural engineering , acoustics , etching (microfabrication) , mechanics , reactive ion etching , layer (electronics) , statistics , physics , mathematics , engineering
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