Open AccessLaser lithography by photon scanning tunneling microscopy
Author(s) -
Ida Lee,
R. J. Warmack,
T. L. Ferrell
Publication year - 1993
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.44854
Subject(s) - scanning tunneling microscope , optics , lithography , laser , materials science , prism , wavelength , optoelectronics , laser scanning , microscopy , line (geometry) , nanotechnology , physics , geometry , mathematics
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