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Reply to “Comment on ‘Dominant diffusing species during cobalt silicide formation’ ” [J. Appl. Phys. 87, 8216 (2000)]
Author(s) -
C.M. Comrie,
R. T. Newman
Publication year - 2000
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.373527
Subject(s) - tantalum , silicide , predictive marker , chemistry , materials science , biology , metallurgy , silicon , genetics , cancer

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