Open AccessIn-situ reactive glow discharge cleaning of NSLS distributed ion pumps
Author(s) -
E. Johnson,
T. S. Chou
Publication year - 1988
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.37298
Subject(s) - glow discharge , torr , argon , in situ , analytical chemistry (journal) , materials science , electrode , ion , chemistry , environmental chemistry , plasma , nuclear physics , physics , organic chemistry , thermodynamics
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