In situ  thin-film texture determination | Zendy

Dmitri Litvinov | Zendy; Thomas O’Donnell | Zendy; Roy Clarke | Zendy

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In situ thin-film texture determination

Author(s) -

Dmitri Litvinov,

Thomas O’Donnell,

Roy Clarke

Publication year - 1999

Publication title -

journal of applied physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.699

H-Index - 319

eISSN - 1089-7550

pISSN - 0021-8979

DOI - 10.1063/1.369519

Subject(s) - reflection high energy electron diffraction , texture (cosmology) , electron diffraction , thin film , reflection (computer programming) , crystallite , materials science , characterization (materials science) , diffraction , optics , orientation (vector space) , crystallography , chemistry , physics , nanotechnology , computer science , mathematics , geometry , artificial intelligence , image (mathematics) , programming language

A kinematic theory of reflection high energy electron diffraction (RHEED) is presented for textured polycrystalline thin films. RHEED patterns are calculated for arbitrary texture situations and for any general crystallographic orientation that may be encountered in thin-film growth. It is shown that the RHEED pattern can be used as a fast and convenient tool for in situ texture characterization. The approach also permits quantitative extraction of angular dispersion parameters which are useful for optimizing thin-film growth conditions. © 1999 American Institute of Physics

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