Electron beam induced current and remote electron beam induced current assessment of chemical vapor deposited diamond films | Zendy

Ana Cremades | Zendy; J. Piqueras | Zendy

Open Access

Electron beam induced current and remote electron beam induced current assessment of chemical vapor deposited diamond films

Author(s) -

Ana Cremades,

J. Piqueras

Publication year - 1999

Publication title -

journal of applied physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.699

H-Index - 319

eISSN - 1089-7550

pISSN - 0021-8979

DOI - 10.1063/1.369275

Subject(s) - cathodoluminescence , electron beam induced current , chemical vapor deposition , materials science , diamond , cathode ray , electron , electron beam physical vapor deposition , thin film , current (fluid) , electron beam processing , optoelectronics , electron beam induced deposition , beam (structure) , deposition (geology) , scanning electron microscope , optics , analytical chemistry (journal) , chemistry , silicon , nanotechnology , scanning transmission electron microscopy , composite material , physics , luminescence , chromatography , quantum mechanics , thermodynamics , biology , paleontology , sediment

In the present work, electron beam induced current (EBIC) has been applied to characterize several kinds of chemical vapor deposition diamond films. Regions of enhanced carrier recombination are detected in plan-view observations of thin films as well as in cross sections of thick films. Remote EBIC (REBIC) has been applied to obtain information about charged defects present in the samples. The dependence of EBIC and REBIC contrast on the contact configuration used, and on the observation conditions has been analyzed. Cathodoluminescence images of the same samples have been recorded for comparison

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