Microstructure and magnetic properties of FeCoN thin films | Zendy

P. C. Kuo | Zendy; Shih-Hang Chang | Zendy; C. M. Kuo | Zendy; Y. D. Yao | Zendy; Hai Huang | Zendy

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Microstructure and magnetic properties of FeCoN thin films

Author(s) -

P. C. Kuo,

Shih-Hang Chang,

C. M. Kuo,

Y. D. Yao,

Hai Huang

Publication year - 1998

Publication title -

journal of applied physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.699

H-Index - 319

eISSN - 1089-7550

pISSN - 0021-8979

DOI - 10.1063/1.367930

Subject(s) - microstructure , materials science , magnetization , grain size , substrate (aquarium) , analytical chemistry (journal) , thin film , saturation (graph theory) , magnetic moment , nitrogen , nuclear magnetic resonance , condensed matter physics , composite material , chemistry , nanotechnology , magnetic field , physics , oceanography , mathematics , organic chemistry , chromatography , quantum mechanics , combinatorics , geology

Effects of nitrogen contents and substrate temperatures to the microstructure and magnetic properties of the FeCoN films have been investigated. According to the TEM and x-ray Scherrer’s equation analyses, we found that the grain size of films with substrate temperature below 200 °C is roughly about 13 nm, however, it increases very fast for films with substrate temperature above 300 °C. N content in the films is saturated to 30 at. %, as N2 flow ratio N2/(Ar+N2) is higher than 5 vol. %. From the magnetization studies, we have found that the saturation magnetization 4πMs of the optimum samples (with the substrate temperature near 200 °C) is 23.9 kG. The improvement of the magnetic properties is attributed to the combination of α-Fe with N to form the high magnetic moment FeN phases.

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