Nanoindentation of high-aspect ratio pillar structures on optical multilayer dielectric diffraction gratings | Zendy

Karan Mehrotra | Zendy; H.P. Howard | Zendy; S. D. Jacobs | Zendy; John C. Lambropoulos | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Nanoindentation of high-aspect ratio pillar structures on optical multilayer dielectric diffraction gratings

Author(s) -

Karan Mehrotra,

H.P. Howard,

S. D. Jacobs,

John C. Lambropoulos

Publication year - 2011

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.3673070

Subject(s) - nanoindentation , materials science , dielectric , diffraction , indentation , yield (engineering) , pillar , stress (linguistics) , aspect ratio (aeronautics) , composite material , transverse plane , optics , optoelectronics , structural engineering , linguistics , philosophy , physics , engineering

The mechanical response of optical multilayer dielectric (MLD) diffraction gratings has been studied using nanoindentation. The results are interpreted using a stress-strain model, which reveals a uniaxial yield stress of 4.1 GPa. It is shown that the indentation response of the high-aspect ratio “pillar” geometry (constrained in one transverse direction but free in the other) can be expressed in terms of yield stress rather than material hardness

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research