Open AccessMicrowave evaluation of Pb0.4Sr0.6TiO3 thin films prepared by magnetron sputtering on silicon: Performance comparison with Ba0.3Sr0.7TiO3 thin films
Author(s) -
Freddy Ponchel,
Xiuyun Lei,
Denis Rémiens,
G.S. Wang,
Xianlin Dong
Publication year - 2011
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.3656065
Subject(s) - materials science , sputter deposition , silicon , optoelectronics , thin film , figure of merit , microwave , dielectric , sputtering , cavity magnetron , annealing (glass) , dielectric loss , substrate (aquarium) , perovskite (structure) , composite material , nanotechnology , computer science , chemistry , telecommunications , crystallography , oceanography , geology
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