Development of microfabricated TiO2 channel waveguides | Zendy

Masayuki Furuhashi | Zendy; Masazumi Fujiwara | Zendy; Takahito Ohshiro | Zendy; Makusu Tsutsui | Zendy; Kazuki Matsubara | Zendy; Masateru Taniguchi | Zendy; Shigeki Takeuchi | Zendy; Tomoji Kawai | Zendy

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Development of microfabricated TiO2 channel waveguides

Author(s) -

Masayuki Furuhashi,

Masazumi Fujiwara,

Takahito Ohshiro,

Makusu Tsutsui,

Kazuki Matsubara,

Masateru Taniguchi,

Shigeki Takeuchi,

Tomoji Kawai

Publication year - 2011

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.3615716

Subject(s) - microfabrication , miniaturization , materials science , waveguide , channel (broadcasting) , refractive index , optoelectronics , optics , nanotechnology , telecommunications , computer science , fabrication , physics , medicine , alternative medicine , pathology

An optical channel waveguide is a key solution to overcome signal propagation delay. For the benefits of miniaturization, development of microfabrication process for waveguides is demanded. TiO2 is one of the suitable candidates for the microfabricated waveguide because of the high refractive index and the transparency. In the present study, conventional microfabrication processes manufactured TiO2 channel waveguides with 1–20 μm width on oxidized Si substrates and the propagation loss was measured. The prepared channels successfully guided light of 632.8 nm along linear and Y-branched patterns. The propagation loss for the linear waveguide was 9.7 dB/cm

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