Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude | Zendy

Stefan M. Weber | Zendy; Luigi Bonacina | Zendy; Wilfried Noell | Zendy; Denis Kiselev | Zendy; Jèrôme Extermann | Zendy; Fabio Jutzi | Zendy; Sébastien Lani | Zendy; O. Nenadl | Zendy; JeanPierre Wolf | Zendy; Ν. F. de Rooij | Zendy

Open Access

Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude

Author(s) -

Stefan M. Weber,

Luigi Bonacina,

Wilfried Noell,

Denis Kiselev,

Jèrôme Extermann,

Fabio Jutzi,

Sébastien Lani,

O. Nenadl,

JeanPierre Wolf,

Ν. F. de Rooij

Publication year - 2011

Publication title -

review of scientific instruments

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.605

H-Index - 165

eISSN - 1089-7623

pISSN - 0034-6748

DOI - 10.1063/1.3606440

Subject(s) - microelectromechanical systems , femtosecond , fabrication , ultrashort pulse , optics , materials science , comb drive , actuator , femtosecond pulse shaping , tilt (camera) , piston (optics) , pulse shaping , pulse (music) , phase (matter) , amplitude , microscale chemistry , laser , optoelectronics , physics , computer science , wavefront , mechanical engineering , alternative medicine , mathematics , artificial intelligence , pathology , detector , engineering , quantum mechanics , medicine , mathematics education

We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase- and amplitude-shaping, and an X-shaped laterally reinforced spring preventing lateral snap-in while providing high flexibility for both degrees of freedom

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