Open AccessInvestigation of effect of excitation frequency on electron energy distribution functions in low pressure radio frequency bounded plasmas
Author(s) -
Sudeep Bhattacharjee,
Trevor Lafleur,
Christine Charles,
Rod Boswell
Publication year - 2011
Publication title -
physics of plasmas
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.75
H-Index - 160
eISSN - 1089-7674
pISSN - 1070-664X
DOI - 10.1063/1.3605021
Subject(s) - physics , electron , atomic physics , excitation , collision frequency , plasma , distribution function , electron temperature , radio frequency , electrical engineering , nuclear physics , quantum mechanics , engineering
S. B. gratefully acknowledges support from an Endeavour Research Fellowship of the Australian Government for carrying out this work.
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