Open AccessExtreme ultraviolet multilayer reflectors
Author(s) -
Marion L. Scott,
P. N. Arendt,
Bernard J. Cameron,
B. E. Newman,
David L. Windt,
W. Cash
Publication year - 1986
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.35996
Subject(s) - extreme ultraviolet lithography , polarizer , extreme ultraviolet , materials science , reflector (photography) , ultraviolet , fabrication , optics , extinction ratio , silicon , optoelectronics , fresnel equations , extinction (optical mineralogy) , refractive index , light source , physics , laser , medicine , wavelength , birefringence , alternative medicine , pathology
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