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Compositional distribution of laser-deposited films and rapid sequential pulsed laser deposition
Author(s) -
Yukio Watanabe,
Yong Woon Seo,
M. Tanamura,
H. Asami,
Yuji Matsumoto
Publication year - 1995
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.359744
Subject(s) - pulsed laser deposition , deposition (geology) , evaporation , laser , stoichiometry , materials science , analytical chemistry (journal) , thin film , pulsed laser , decomposition , chemistry , optics , nanotechnology , thermodynamics , paleontology , physics , organic chemistry , chromatography , sediment , biology

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